Overview

Instrument feedthroughs for vacuum applications adopt standard form factors such as MIL-C-24308, MIL-C-26482, MIL-C-5015, and IEC60130-9. Through specially designed sealing methods, they transmit electrical signals, control signals, or power from the outside to equipment inside the vacuum chamber while maintaining chamber airtightness. The pins of signal feedthroughs are highly compact, enabling multi-channel current transmission within a limited space. The housing is made of stainless steel, with glass-ceramic used for internal sealing and electrical insulation, ensuring low outgassing and stable operation—making them compatible with ultra-high vacuum systems.

Instrument feedthroughs can be welded to various flanges, including CF, KF, and ISO-K, to accommodate different vacuum levels and application requirements.

The main body of the vacuum-side connector is made of PEEK material, with screws securing the pins and PEEK together. Vacuum cables are connected to the pins via crimping or welding and pass through pre-drilled holes in the PEEK shell. For certain types of signal feedthroughs, the vacuum-side connector also features an aluminum shell. This aluminum protective cover wraps around the PEEK shell and is fastened with screws, helping to secure the vacuum cables together.

Matching atmosphere-side connectors are also available.

Common structures of instrument feedthroughs are illustrated in the figure below.