Overview 

Thermocouples operate based on the Seebeck effect. They consist of two dissimilar metals or alloys. When the two junctions are at different temperatures, a voltage signal (thermoelectric EMF) is generated in the circuit. This voltage has a defined relationship with the temperature difference and can be used to measure temperature. The role of thermocouple feedthroughs is to ensure that the signal passes through the vacuum chamber wall, pressurized vessel, or shield without distortion due to material mismatch, while maintaining the sealed integrity of the internal environment.

Application scenarios for thermocouple feedthroughs include temperature monitoring in vacuum furnaces, temperature measurement in vacuum chambers of semiconductor manufacturing equipment (such as ion beam and plasma systems), and temperature feedback systems in nuclear energy, aerospace, and scientific research equipment for transmitting thermocouple signals in high-pressure or corrosive environments.

The most commonly used thermocouples are Type K and Type C. Other types include Types R, S, and T, among others.

Thermocouple feedthroughs can be combined with power feedthroughs to jointly enable system control, power supply, and temperature monitoring.

Through an improved CTS-type feedthrough design, multiple pairs of thermocouple signals can be transmitted within a relatively compact space.