Overview 

Power feedthroughs are primarily used to transmit high voltage, high current, or both simultaneously into a vacuum chamber. For standard products, the maximum voltage reaches 100 kV, and the maximum current reaches 1000 A.

Power feedthroughs are applied across a wide range of scenarios, including semiconductor processing equipment, particle accelerators, furnaces, analytical instruments, vacuum coating systems, satellite instruments, and X-ray inspection equipment. Typical applications include vacuum furnaces, sample heating, bias application, as well as vacuum coating processes such as electron beam evaporation, resistance heating evaporation, and DC plasma sputtering.

These feedthroughs are compatible with CF, KF, and ISO flanges, accommodating different vacuum levels and application requirements.